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发明名称
摘要
申请公布号
JPH0377620(B2)
申请公布日期
1991.12.11
申请号
JP19820120702
申请日期
1982.07.13
申请人
EATON CORP
发明人
UIKUTAA MORISU BENUENISUTO;PIITAA HENRII ROOZU
分类号
H01J37/20;H01J37/317;H01L21/00;H01L21/265
主分类号
H01J37/20
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代理人
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