| 摘要 |
PURPOSE:To lengthen life, obtain stable laser output for long term, unnecessitate a capacitor for balancing a discharge current, and simplify the structure of an electrode unit, by forming a dielectric film on the surface of an electrode. CONSTITUTION:Electrodes 100A, 100B are coated with dielectric films 110A, 110B, and constitute a capacitor. Its capacitance is made equal to the value of the conventional capacitor by selecting permittivity and adjusting the film thickness. Hence discharge current balancing capacitors which have been inserted in series to each electrode are eliminated. In this electrode structure, the electrodes 100A, 100B do not directly come into contact with laser medium gas, so that oxidation reaction is not generated and the life is extremely lengthened. Further the deteriorations of the laser medium gas, a mirror, and a heat exchanger are prevented, so that stable laser output can be obtained for a long term. |
