| 摘要 |
<p>PURPOSE:To prevent a pellicle film from sticking to a mask surface in the case of removing the pellicle by cutting away the pellicle film in the stage of sucking the same to a suction plate. CONSTITUTION:This device 6 is formed by supporting the suction plate 8 consisting of 'Teflon(R)' in a cap-shaped frame body 7 and supporting a cutter 9 having an annular cutting tooth 12 vertically movable between the frame body 7 and the suction plate 8. This device 6 is imposed on the frame 2 of the pellicle 1 adhered to a mask 4 and the pellicle film 3 is sucked to the suction plate 8. The tooth 12 is lowered by pressing an operating part 13 of the cutter 9 downward in this state to cut the film 3 on the inner side of the frame 2; thereafter, the device 6 is removed. The frame 2 is thereafter removed from the mask 4 by using a jig.</p> |
