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发明名称
PLASMA VAPOR DEPOSITING DEVICE
摘要
申请公布号
JPH02247375(A)
申请公布日期
1990.10.03
申请号
JP19890066331
申请日期
1989.03.20
申请人
ANELVA CORP
发明人
HOSOKAWA NAOKICHI;YAMAZAKI TAKESHI;ARAKAWA HIROSHI;SEKIGUCHI ATSUSHI;TAKAGI SHINJI
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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