| 发明名称 |
X-Y TABLE |
| 摘要 |
|
| 申请公布号 |
JPH01314994(A) |
申请公布日期 |
1989.12.20 |
| 申请号 |
JP19880147290 |
申请日期 |
1988.06.15 |
| 申请人 |
TOKYO ELECTRON LTD |
发明人 |
ONO HIROO |
| 分类号 |
G12B5/00;H01L21/66 |
主分类号 |
G12B5/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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