| 摘要 |
PURPOSE:To control a displacement quantity and a generating force accurately and enable the feedback for the elimination of hysteresis by a method wherein a part of a piezoelectric material layer is separated from an outer electrode layer, and the separated part is made to serve as a pressure sensor. CONSTITUTION:A part 4 of a piezoelectric material layer 1 is separated from outer electrode layers 3A and 3B, which is used as a pressure sensor 20. By using a part of a piezoelectric material layer as a pressure sensor, a point that a force starts to act on a laminated type piezoelectric element can be detected when the laminated type piezoelectric element incorporated into a mechanical system is used. And, the hysteresis of the displacement quantity accompanying the increase and reduction of an applied voltage can be transmitted outside as a signal. By these processes, the signal is fed back to a drive power source side to eliminate the hysteresis. |
