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发明名称
INSTALLATION DE PULVERISATION CATHODIQUE A POSTES JUXTAPOSES
摘要
申请公布号
FR2562560(B1)
申请公布日期
1989.07.28
申请号
FR19850004972
申请日期
1985.04.02
申请人
LEYBOLD HERAEUS GMBH
发明人
PETER MAHLER
分类号
C23C14/34;C23C14/56;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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