摘要 |
<p>A dual sided pressured sensor, which is particularly useful for measuring differential pressures, comprises a diaphragm (10) having top and bottom surfaces (12, 16) with pairs of strain gauges (14, 18) on both these surfaces. The two pairs of strain gauges (14, 18) are substantially at the same radial position on the diaphragm (10) and preferably near its centre (Figure 8a) or near its outer periphery (Figure 10a). The gauges can be connected in a Wheatstone bridge configuration to measure pressures applied to the diaphragm which result in slight bending of the diaphragm. The bending applies compressive and tensile pressures to the two pairs of gauges for changing an electrical characteristic thereof. The electrical characteristic normally changes in a nonlinear fashion. The nonlinearity, however, for the pairs of gauges on the top and bottom surfaces, are of opposite signs and equal magnitude so that they cancel each other to provide an accurate pressure measurement.</p> |