FURNACE FOR HEAT TREATMENT OF SEMICONDUCTOR SUBSTRATES,申请号GB19850022835-传众专利搜索

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发明名称	FURNACE FOR HEAT TREATMENT OF SEMICONDUCTOR SUBSTRATES
摘要
申请公布号	GB2167541(B)	申请公布日期	1989.04.12
申请号	GB19850022835	申请日期	1985.09.16
申请人	* HERAEUS QUARZSCHMELZE GMBH	发明人	KARL A * SCHULKE;CHRISTOPHER J * BAYNE;GEOFFREY * HAYWARD
分类号	C23C8/06;C30B31/14;H01L21/22	主分类号	C23C8/06
代理机构		代理人
主权项
地址

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