| 摘要 |
PURPOSE:To prevent melting of a seed by using carbon or ceramics to form the parts of a seed chuck and seed retaining member for sandwiching the speed between said chuck and member where the chuck and member come into contact with the seed. CONSTITUTION:The seed retaining member 9 is provided to sandwich the seed 4 between said member and the seed chuck 6. Projecting parts 9b of the seed retaining member are fitted into grooves 8 of the seed 4, by which the end of the seed 4 is sandwiched and held between the seed chuck 6 and the seed retaining member 9. The seed 4 is sandwiched and held by the seed chuck 6 and the seed retaining member 9 by using the seed chuck 6 and seed retaining member 9 made of the carbon (or ceramics) and this seed is held for about 20hr at about 15mm above the GaAs melt under the conditions for growing the single crystal of GaAs. Then, no melting is admitted at all in the seed.
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