| 摘要 |
PURPOSE:To enhance the efficiency of heat exchange as well as the efficiency or processing chemical solution flow,by a method wherein a plurality of flow paths is formed inside, a heater is embedded between these flow paths, and guide flanges having a tapered guide surface are provided on the inlet and outlet parts of said paths. CONSTITUTION:A powder material comprising essentially silicon carbide is molded under pressure and presintered to form a heat exchange block 100, an inlet flange 103 and an outlet flange 104. Subsequently the inlet flange 103 and the outlet flange 104 are put in a state of overlaying both the ends of the heat exchange block 100 and sintered at a temperature slightly higher than the presintering temperature to make them into one body. At the final stage, a heater is inserted through the hole of the heat exchange block 100 to connect with first and second pipings. Since the heat exchanger thus formed has the heater embedded within the heat exchange block and additionally has the guide surfaces of the inlet and outlet flanges as well as the projections, a processing chemical solution flow efficiently through the paths within the heat exchange block and the efficiency of heat exchange is remarkably enhanced.
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