| 摘要 |
PURPOSE:To obtain a characteristic excellent in high-frequency characteristic by forming a surface layer consisting of diamond, and a carbon compound of amorphous carbon, titanium carbide, silicon carbide, boron carbide, and boron carbide and nitride on one face or both faces of a glass-shaped diaphragm base material made of carbon. CONSTITUTION:On both faces of a glass-shaped carbon diaphragm base material 1, surface layers 1a, 1b consisting of diamond, and a carbon compound of titanium carbide, silicon carbide, boron carbide, and boron carbide and nitride, including amorphous carbon are formed by a reactive ion plating method. By forming such surface layers 1a, 1b, an acoustic constant can be improved remarkably, and a frequency characteristic in high compass can be improved. Also, a pinhole of the diaphragm can be prevented without special processing, therefore, a manufacturing process of the diaphragm can be simplified.
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