| 摘要 |
PURPOSE:To recognize the melting state of a metal without bringing a sensor into contact with a raw material metal by attaching temp. sensors to the periphery of a crucible so that the change of the temp. distribution pattern by the positional deviation of an incident electron beam is known. CONSTITUTION:The electron beam 15 is irradiated to the raw material metal 16 in the crucible 11 and metallic vapor is generated. the plural temp. sensors 19-22 are attached to the outside peripheral part of the crucible 11. The temp. distributions in the various parts of the crucible 11 are recognized by the outputs of the sensors 19-22 by utilizing the means for recognizing the temp. distributions.
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