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发明名称
摘要
申请公布号
SU361486(A1)
申请公布日期
1972.12.07
申请号
SU19711666842
申请日期
1971.05.31
申请人
发明人
分类号
H01L31/18;H01J29/20;(IPC1-7):01L3/20;01J29/20
主分类号
H01L31/18
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代理人
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