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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPS6250471(A)
申请公布日期
1987.03.05
申请号
JP19850191364
申请日期
1985.08.30
申请人
ALPS ELECTRIC CO LTD;ICHINOSE YUKIO
发明人
ICHINOSE YUKIO;MUKASA KOICHI;NISHIZAWA KAZUO
分类号
C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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