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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPS6246524(A)
申请公布日期
1987.02.28
申请号
JP19850185716
申请日期
1985.08.26
申请人
HITACHI LTD
发明人
HIROBE YOSHIMICHI;NOJIRI KAZUO;AZUMA HIDEAKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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