APPAREIL POUR COLLER UN FILM ADHESIF SUR UN ANNEAU DE SUPPORT ET UN OBJET MINCE

摘要

An apparatus for semiautomatically sticking an adhesive film on a silicon wafer and on a ring used as a carrier. After the ring and the silicon wafer have been manually positioned on tables, an adhesive film is automatically stuck on the ring and the silicon wafer. The excess portion of the film is then cut by hand along the ring and transversely. The apparatus greatly facilitates these works.