发明名称 SEMICONDUCTOR SUBSTRATE CONTAINER
摘要 PURPOSE:To prevent the semiconductor-forming surface of a semiconductor substrate from contact with the groove aperture surface of a substrate containment section, by shaping the substrate containing section in a linear structure of unsymmetry. CONSTITUTION:The semiconductor substrate containment guide 1 has the structure that a groove aperture 3 is larger than the groove bottom 4 of the semiconductor containment guide. Besides, the distance from the groove aperture surface 8 of said guide located on the semiconductor-forming surface 6 side of a semiconductor substrate 5 to the substrate 5 is larger than the distance from the groove aperture surface 9 of said guide located on the semiconductor-forming surface back 7 side of the substrate 5 to the substrate 5. A semiconductor receiver 2 has a structure completely equal to that of said guide, and the respective groove of said guide 1 and the semiconductor substrate receiver 2 are in the same line and constructed at equal pitches. When the semiconductor substrate 5 is stored in the above-mentioned container, the semiconductor-forming surface 6 does not come into contact with the groove aperture surface 8 of said guide.
申请公布号 JPS61160950(A) 申请公布日期 1986.07.21
申请号 JP19850001628 申请日期 1985.01.09
申请人 NEC CORP 发明人 SEO YUJI
分类号 H01L21/67;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/67
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