摘要 |
PURPOSE:To broaden the measuring range of elements in a sample and to improve detecting sensitivity and analyzing accuracy, by using an alloy target for an X ray tube, obtaining a specified wavelength by a spectroscopic crystal plate, and thereafter projecting X rays on the sample. CONSTITUTION:An alloy of heavy metal is used as an anode target of an X ray tube 1. The generated primary X rays X1 are inputted to a spectroscopic crystal 3 at an angle theta through a solar slit 2, and only the specified wavelength is reflected. Then the spectroscopic X rays X2 can be set at an arbitrary wavelength by the angle theta. Thus a monochromatic color is formed. Then, the spectroscopic X rays X2, which are made to be the monochromatic color, are projected on a sample 6 through a solar slit 5. Elements in the sample are excited, and the characteristic X rays for each element is generated. Fluorescent X rays X3 are detected by a detector 8. Energy is divided by a system 9, and the qualities and quantities of many elements are determined. In this way, sensitivity is improved, background of the fluorescent X rays X3 become less at the same time, and the detecting limit is improved. Analyzing accuracy is also improved. |