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发明名称
PHOTOMASK FOR SEMICONDUCTOR
摘要
申请公布号
JPS53105378(A)
申请公布日期
1978.09.13
申请号
JP19770020056
申请日期
1977.02.25
申请人
ORIGIN ELECTRIC
发明人
OGAWA KOUICHI
分类号
G03F1/00;G03F1/70;H01L21/027;H01L21/302
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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