发明名称 METHOD FOR MANUFACTURING THIN FULM RESISTANCE
摘要 <p>PURPOSE:To obtain an ormic contact between TaN2 and electrode film, by destroying an insulator residing inevitably between them by applying a voltage of high-power impedance.</p>
申请公布号 JPS5379294(A) 申请公布日期 1978.07.13
申请号 JP19760154190 申请日期 1976.12.23
申请人 FUJITSU LTD 发明人 KOBAYASHI MASAHIRO;NAKAYAMA TOSHIHIRO;YOSHIDA SHINJI
分类号 H01C17/06;H01C17/00;H01L27/01;H05K1/11;H05K3/00 主分类号 H01C17/06
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