Einrichtung zur Feinjustierung von Fotomasken,申请号DE19661522287-传众专利搜索

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发明名称	Einrichtung zur Feinjustierung von Fotomasken
摘要
申请公布号	DE1522287(A1)	申请公布日期	1969.08.07
申请号	DE19661522287	申请日期	1966.07.01
申请人	TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH	发明人	MANFRED BOERNER,DIPL.-PHYS.DR.RER.NAT.
分类号	B23Q1/34;G03F7/20;H01L21/68	主分类号	B23Q1/34
代理机构		代理人
主权项
地址

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