发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To connect a semiconductor substrate 1 and a first conductive layer 3 at the shortest distance, to increase the speed of a device and to improve the degree of integration thereof by removing one parts of the first conductive layer and an insulating layer, forming a stepped section and applying a second conductive layer onto the semiconductor substrate and the first conductive layer while covering the stepped section. CONSTITUTION:An insulating layer 2 and a first conductive layer 3 are applied onto a semiconductor substrate 1 in succession, one parts of the first conductive layer 3 and the insulating layer 2 are removed to shape a stepped section 5, and a second conductive layer 6 is applied onto the semiconductor substrate 1 and the first conductive layer 3 while covering the stepped section 5. That is, the gate 3 and the substrate 1 are connected by the wiring layer 6 applied while covering the stepped section 5. The wiring layer 6 is wired at the shortest distance, thus improving the degree of integration.
申请公布号 JPS61216447(A) 申请公布日期 1986.09.26
申请号 JP19850058902 申请日期 1985.03.22
申请人 FUJITSU LTD 发明人 SHIRAI KAZUNARI;EMA YASUJI
分类号 H01L27/10;H01L21/3205;H01L21/768;H01L21/8242;H01L23/522;H01L27/108;H01L29/78 主分类号 H01L27/10
代理机构 代理人
主权项
地址
您可能感兴趣的专利