| 摘要 |
PURPOSE:To obtain the highly reliable angular-velocity sensor by the method of excellent workability with respect to the angular-velocity sensor using a parallel-connection type piezoelectric bimorph elements. CONSTITUTION:Driving piezoelectric elements 3 and 4 which are bonded in parallel are connected to detecting piezoelectric elements 1 and 2 at right angles through bonding members 5 and 6, and a sensor element is formed. A pair of the sensor elements are bonded with a bonding member 7 at the end parts of the driving piezoelectric elements 3 and 4 so as to form a tuning-fork structure. The rear-side electrodes and the front-side electrodes of the driving piezoelectric elements 3 and 4 or the detecting piezoelectric elements 1 and 2 are electrically connected through conductor patterns provided at the bonding members 5 and 6. |
