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发明名称
LOW PRESSURE CVD DEVICE
摘要
申请公布号
JPH01318231(A)
申请公布日期
1989.12.22
申请号
JP19880151417
申请日期
1988.06.20
申请人
TEL SAGAMI LTD;TOKYO ELECTRON LTD
发明人
OHARA SAKAE;UEDA YASUHIRO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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