| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer film reflector excellent in durability by preventing the multilayer film from being deteriorated caused by collisions of particles such as ions generated from an EUV light-source.SOLUTION: The multilayer film reflector includes a multilayer film, formed by alternately laminating heavy element layers and light element layers on a substrate, having a Bragg diffraction effect. For the heavy element layers, any one of niobium, a niobium compound, and a niobium alloy is used.SELECTED DRAWING: Figure 1 |
