METHOD FOR ELECTRONIC CONTROL OF A MEASUREMENT STAND

摘要

The invention relates to a method for the electric control of a measurement stand (11) having a drive movement of at least one measurement probe (26) from an initial position (31) into a measurement position (32), in particular for the measurement of the thickness of thin layers in which a motor (34) is controlled for the drive movement of the measurement probe (26), said motor (34) moving a ram (23), to which the measurement probe (26) is fastened, back and forth via a drive device (35) at least for the implementation of a measurement, wherein before a first measurement with the measurement probe (26), a learning routine is carried out, and for the subsequent implementation of one or more measurements, the measurement probe (26) is transferred from the initial position (31) into the measurement position (32), and the drive path of the measurement probe (26) from the initial position (31) into the measurement position (32) is divided into a fast speed and, before the setting of the measurement probe (26) on the measurement object (14), a slow speed, wherein the number of pulses for the fast speed is reduced by the number of pulses for the slow speed, originating from the total number of the determined pulses of the drive path and the number of pulses for the drive path at the fast speed is a multiple of the number of pulses of the drive path at the slow speed.

主权项

1. A method for the electrical control of a measurement stand having a drive movement of at least one measurement probe from an initial position into a measurement position, in particular for the measurement of the thickness of thin layers, in which a motor is controlled for the drive movement of the measurement probe, said motor moving a ram, to which the measurement probe is fastened, back and forth via a drive device at least to implement a measurement, wherein
before a first measurement with the measurement probe, a learning routine is carried out, in which the measurement probe is lowered from the default initial position with a predetermined drive speed until the measurement probe is supported on a measurement surface of the measurement object or on a calibration normal corresponding to the measurement object, in which, at the point in time of the support of the measurement probe on the measurement surface, a control signal is emitted by the measurement probe and the motor is shut down, in which a number of pulses of the motor or of a path sensor coupled to the motor is recorded from the beginning of the drive movement of the measurement probe from the default initial position until the shutdown of the motor in the measurement position and in which the measurement probe is guided back into the initial position and the learning routine is ended, and for the subsequent implementation of one or more measurements, the measurement probe is transferred from the initial position into the measurement position, and the drive path of the measurement probe from the initial position into the measurement position is divided into a fast speed and, before the setting of the measurement probe on the measurement object, a slow speed, wherein the number of pulses for the fast speed is reduced by the number of pulses for the slow speed, originating from the total number of determined pulses for the drive path, and the number of pulses for the drive path at the fast speed is a multiple of the number of pulses of the drive path at the slow speed.