发明名称 METHOD AND DEVICE FOR THE ALTERNATING CONTACTING OF TWO WAFERS
摘要 <p>A method and device for the alternating contacting of two wafer-type component composite arrangements (12,14) from a plurality of connected similar components, particularly a semiconductor wafer with a functional component wafer, for the production of electronic modules on a wafer plane, wherein the two component composite arrangements provided with contact metallizations respectively on the opposite-lying contact surfaces (38,39) thereof are pressed against each other in order to form contact pairs with the contact metallizations thereof and the contacting of the contact metallizations occurs by backward impingement of one compound composite arrangement (12) with laser radiation, wherein the wavelength of the laser radiation is selected according to the absorption degree of the backwardly impinged upon component-composite arrangement such that transmission of the laser radiation by the backwardly impinged upon component-composite arrangement is substantially prohibited or absorption of the laser radiation occurs essentially in the contact metallizations of one or both component-composite arrangements..</p>
申请公布号 KR20060132599(A) 申请公布日期 2006.12.21
申请号 KR20067010721 申请日期 2004.12.02
申请人 PAC TECH-PACKAGING TECHNOLOGIES GMBH 发明人 ZAKEL ELKE;AZDASHT GHASSEM
分类号 H01L23/10;H01L21/027;H01L21/50;H01L21/60;H01L21/98;H01L25/065;H01S5/02;H01S5/042;H01S5/40 主分类号 H01L23/10
代理机构 代理人
主权项
地址