| 摘要 |
PURPOSE:To improve the water saving effect without deteriorating washing effect even if only several washing tanks among a multiplicity of washing tanks are used, by providing orifices in first and second discharge tubes for restricting a passage of each tube to a predetermined cross-sectional area. CONSTITUTION:An orifice 11 is arranged between a discharge tube 4 and a pipe 10, and a bore 11a is arranged at the center of the orifice 11 for restricting a passage into a predetermined cross-sectional area. The pipe 10 is provided with a collar 10a and a groove 10b and an O ring 13 is fitted thereon. An electrovalve 3 and respective bibcocks 5 are opened so that selected tanks 6 are supplied with water and wafers 8 are washed thereby. The orifice 11 is arranged in the passage of the discharge tube 4 so that the amount of water in each washing tank 6 is held at an appropriate level for that washing tank 6. When, for example, only one of among four washing tanks 6 is used, the amount of water supplied through the discharge tube 4 is regulated by the orifice 11. This amount of water makes little difference from that in the case of using all the four tanks, and the wafer can be washed by a predetermined flow of water. Since a pipe 1 can be rotated in a horizontal plane by 360 deg., extremely high workability can be provided.
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