Gerät mit einer Abtasteinrichtung zum Abtasten eines eine Ausrichtmarkierung tragenden Objekts und seine Verwendung,申请号DE19843424453-传众专利搜索

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发明名称	Gerät mit einer Abtasteinrichtung zum Abtasten eines eine Ausrichtmarkierung tragenden Objekts und seine Verwendung
摘要
申请公布号	DE3424453(C2)	申请公布日期	1996.12.12
申请号	DE19843424453	申请日期	1984.07.03
申请人	CANON K.K., TOKIO/TOKYO, JP	发明人	AYATA, NAOKI, MACHIDA, TOKIO/TOKYO, JP
分类号	G03F9/00;(IPC1-7):G05D3/20;H01L21/68	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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