SUBSTRATE MANUFACTURING APPARATUS, AND METHOD OF VACUUM PUMPING AND VENTING THEREOF

摘要

A substrate manufacturing apparatus, a vacuum pumping method used for the same and a venting method are provided to improve productivity by reducing a vacuum pumping time and a venting time using first and second pumping units. A substrate manufacturing apparatus includes a chamber(110) divided into first and second regions, a substrate loading unit in the chamber, first and second pumping units, and a gas inlet line. The first and second pumping units are connected through the first and second regions of the chamber, respectively. The gas inlet line is connected through one out of the first and second regions of the chamber. The first and second pumping units include a venting part, respectively.