| 摘要 |
PROBLEM TO BE SOLVED: To uniformize the film thickness distribution of a coating solution inclusive of a final coating position, which is applied to a member to be coated, easy to adjust and hard to get out of order over a long period of time. SOLUTION: A coating solution supply device 2 is driven while moving a coating solution discharge device 3 in a relatively horizontal direction with respect to the member 13 to be coated placed on a support stand to supply the coating solution to the coating solution discharge device 3 and the coating solution is applied to the member 13 to be coated through the nozzle of the coating solution discharge device 3. This coating apparatus is equipped with the branch pipe 19 communicating on the way of the piping reaching the nozzle of the coating solution discharge device 3, a coating solution suction device 5 for sucking the coating solution from the nozzle through the branch pipe 19 and a control device 6 for starting the sucking operation of the coating solution by the coating solution sucking device 5 when the leading end opening part of the nozzle of the coating solution discharge device 3 reaches the final coating region of the member 13 to be coated. COPYRIGHT: (C)2008,JPO&INPIT
|
