| 发明名称 |
Silicon-Based MEMS Devices Including Wells Embedded with High Density Metal |
| 摘要 |
In one aspect, the disclosure is directed to a MEMS device. The MEMS device includes a silicon-based movable MEMS sensor element. The MEMS device also includes a plurality of wells formed into at least one surface of the movable MEMS sensor element. Each well is filled with at least one metal so as to increase the effective mass of the movable MEMS sensor element. The metal may be tungsten or tantalum, or an alloy with tungsten or tantalum. |
| 申请公布号 |
US2016178656(A1) |
申请公布日期 |
2016.06.23 |
| 申请号 |
US201514695421 |
申请日期 |
2015.04.24 |
| 申请人 |
Analog Devices, Inc. |
发明人 |
Zhang Xin;Judy Michael W. |
| 分类号 |
G01P15/14;H01L21/48 |
主分类号 |
G01P15/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device comprising:
a silicon-based movable MEMS sensor element; and a plurality of wells formed into at least one surface of the movable MEMS sensor element, wherein each well is filled with at least one metal so as to increase the effective mass of the movable MEMS sensor element. |
| 地址 |
Norwood MA US |
