SELF-ASSEMBLY NANOPATTERN MANUFACTURING METHOD USING LIGHT

摘要

The present invention relates to a nanopattern manufacturing method for forming a pattern by increasing the temperature of a self-assembling polymer through light irradiation, the nanopattern manufacturing method inducing directed self-assembly after a complete disordered state is made by inducing χΝ of a self-assembling polymer to be 10.5 or less at the part irradiated with light.