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经营范围
发明名称
COPPER FILM ETCHING
摘要
申请公布号
JPH05102094(A)
申请公布日期
1993.04.23
申请号
JP19910263600
申请日期
1991.10.11
申请人
SONY CORP
发明人
HOSHINO KAZUHIRO
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L23/52
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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