发明名称 OPTICAL CIRCUIT IN WHICH FABRICATION IS EASY
摘要 In a method for fabricating an optical circuit, a mirror element with a protection film formed within a die of a semiconductor is connected to a substrate at a predetermined position. The mirror element with the protection film connected to the substrate is peeled from the die of the semiconductor. The protection film is removed to expose a reflection surface of a reflection film of the mirror element.
申请公布号 CA2344778(A1) 申请公布日期 2001.12.23
申请号 CA20012344778 申请日期 2001.04.24
申请人 NEC CORPORATION 发明人 KITAJO, SAKAE;ODA, MIKIO;SOEJIMA, KOJI
分类号 G02B6/12;G02B6/122;G02B6/42;(IPC1-7):G02B6/13 主分类号 G02B6/12
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