Detecting open and short of conductors

摘要

A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.

主权项

1. A method for evaluating a conductor during a fabrication of an electrical circuit, the method comprising:
simultaneously illuminating a first area of the conductor with a first electron beam thereby charging the first area, and illuminating a second area of the conductor with a second electron beam, the second area spaced apart from the first area, where an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting electrons emitted from the first and second areas with one or more detectors and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor between the first area and the second area, wherein the first electron beam and the second electron beam charge the conductor by at least one of different charging rates or opposite polarities such that the charging of the conductor by each of the first electron beam and the second electron beam can be differentiated for determining whether the second area is charged as a result of the charging of the first area.