ETCHING GAS AND ETCHING METHOD,申请号JP19950302139-传众专利搜索

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发明名称	ETCHING GAS AND ETCHING METHOD
摘要
申请公布号	JPH09129612(A)	申请公布日期	1997.05.16
申请号	JP19950302139	申请日期	1995.10.26
申请人	TOKYO ELECTRON LTD	发明人	KOSHIISHI AKIRA
分类号	C23F1/12;C23F4/00;H01L21/302;H01L21/3065;H01L21/311;(IPC1-7):H01L21/306	主分类号	C23F1/12
代理机构		代理人
主权项
地址

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