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发明名称
荷電粒子を偏向させる偏向板および偏向装置
摘要
A deflection plate having a non-planar shape, for deflecting charged particles is provided. An associated method is also provided.
申请公布号
JP6053919(B2)
申请公布日期
2016.12.27
申请号
JP20150514361
申请日期
2012.05.31
申请人
シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ
发明人
ピーター サイモン アプテイカー;ポール ビーズリー;オリヴァー ハイト
分类号
H05H7/08;H05H9/00
主分类号
H05H7/08
代理机构
代理人
主权项
地址
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