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发明名称	ION SOURCE DEVICE
摘要
申请公布号	JPH065218(A)	申请公布日期	1994.01.14
申请号	JP19920188585	申请日期	1992.06.22
申请人	NISSIN ELECTRIC CO LTD	发明人	MIYAKE KOJI;MATSUBARA KATSUO;TAWARA HIDEAKI
分类号	H01J27/08;H01J37/08;(IPC1-7):H01J27/08	主分类号	H01J27/08
代理机构		代理人
主权项
地址

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