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发明名称
PLASMA CLEANING PROCESS
摘要
申请公布号
JPS635532(A)
申请公布日期
1988.01.11
申请号
JP19860148723
申请日期
1986.06.25
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TANAKA YASUO;HOUCHIN RIYUUZOU;TANNO MASUO
分类号
H01L21/205;H01L21/302;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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