| 摘要 |
PROBLEM TO BE SOLVED: To provide a test element for a semiconductor device capable of detecting a connection state between a wiring and a plug by a narrow area.SOLUTION: A test element for a semiconductor device includes a plurality of first conductive plugs 13b-13bformed above or below a plurality of first conductive patterns 14a-14aand a second conductive pattern 11, and has a structure in which, depending on difference in lateral position of the plurality of first conductive plugs 13b-13brelative to any of the plurality of first conductive patterns 14a-14aand the second conductive pattern 11, the number of connections of resistive elements 3r-3rconnected between the second conductive pattern 11 and a third conductive pattern 10 is varied. |
