WIRE BONDING APPARATUS COMPRISING AN OSCILLATOR MECHANISM

摘要

A wire bonding device comprises: an ultrasonic transducer including a capillary; a flexible connecting frame having a first side to which the ultrasonic transducer is connected; and at least one electrically-driven actuator which is connected to a second side of the flexible connecting frame, opposite to the first side thereof, and which has a longitudinal actuation direction. An elongated slit located in the flexible connecting frame extends substantially transversely to the actuation direction of the at least one actuator to form at least one pivot point adjacent to an end of the slit around which the flexible connecting frame is rotatable when the flexible connecting frame is driven by the at least one actuator.