| 摘要 |
PROBLEM TO BE SOLVED: To provide a water vapor generating device for letting a gas containing water vapor supplied into a thermoanalyzer to follow the temperature in the thermoanalyzer and for finely controlling the amount of the water vapor. SOLUTION: A gas cylinder for supplying dry air is connected to the upstream end of a main flow channel 2 via a pressure regulator 3. An MFC 4, a gas-liquid mixing part 15, an atomization part 16 and a heat exchange part 18 are disposed on the main flow channel 2 from the upstream side in this order, and a water supply control part 5 for supplying water to the main flow channel 2 is connected to the gas-liquid mixing part 15. The water supply control part 5 includes a control valve 12 for controlling the amount of water supply to the gas-liquid mixing part 15 based on the humidity, or humidity and temperature in the thermoanalyzer 20. In the atomization part 16, water in the gas-liquid mixed fluid mixed in the gas-liquid mixing part 15 is atomized, and in the heat exchange part 18, the gas-liquid mixture fluid atomized in the atomization part 16 is heated to the temperature in the thermoanalyzer 20. The fluid which is heated at the heat exchange part 18 and the water of which is vaporized is supplied into the thermoanalyzer 20 as the water vapor containing gas. COPYRIGHT: (C)2009,JPO&INPIT
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