发明名称 |
ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic device having high reliability and superior reflection characteristics without increasing manufacturing processes. <P>SOLUTION: The electronic device 200 includes a substrate 1 and a conductive reflection film 40 formed on the substrate 1 and comprising at least an Mo-based film 41 and an Al-based film 42 formed thereon. The surface roughness Ra of the Mo-based film 41 in the conductive reflection film 40 is ≤5 nm; and the reflectance of the Al-based film 42 is ≥85% at a wavelength of 350-550 nm. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2010281995(A) |
申请公布日期 |
2010.12.16 |
申请号 |
JP20090134798 |
申请日期 |
2009.06.04 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
NAGAYAMA KENSUKE;MIYAMOTO KENICHI;INOUE KAZUNORI |
分类号 |
G09F9/30;G02F1/1335;G02F1/1343;G02F1/1368;G09F9/00;H01L21/3205;H01L23/52 |
主分类号 |
G09F9/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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