发明名称 ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide an electronic device having high reliability and superior reflection characteristics without increasing manufacturing processes. <P>SOLUTION: The electronic device 200 includes a substrate 1 and a conductive reflection film 40 formed on the substrate 1 and comprising at least an Mo-based film 41 and an Al-based film 42 formed thereon. The surface roughness Ra of the Mo-based film 41 in the conductive reflection film 40 is &le;5 nm; and the reflectance of the Al-based film 42 is &ge;85% at a wavelength of 350-550 nm. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010281995(A) 申请公布日期 2010.12.16
申请号 JP20090134798 申请日期 2009.06.04
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAGAYAMA KENSUKE;MIYAMOTO KENICHI;INOUE KAZUNORI
分类号 G09F9/30;G02F1/1335;G02F1/1343;G02F1/1368;G09F9/00;H01L21/3205;H01L23/52 主分类号 G09F9/30
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