| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can easily and inexpensively fix objects to be machined having various kinds of shapes to a table, and is excellent in laser beam machining precision. <P>SOLUTION: The laser beam machining apparatus includes: a table 201 for fixing an object OB of a flat plate shape; a turning means for turning the table 201; a laser beam machining head 200 for converging the laser beam by an objective lens and applying it to the object OB of the flat plate shape which is preset to the table; a radial direction moving means for moving the table 201 in the radial direction of the table 201 relative to the laser beam machining head 200; and a signal holding means in which the table 201 has a plurality of recesses, the object OB is fixed to the table 201 by a fixing member attachable/detachable to/from the recesses of the table 201, and a focus servo control means holds the control signal by the intensity at the boundary position set to a vicinity of the inner side from an edge of the object OB or at the boundary position in an area in a vicinity of the fixing member while the focus of the laser beam passes at least the fixing member. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
