| 摘要 |
An inspection device according to one aspect of the present invention is provided with: a light source which outputs light; an MO crystal which is disposed to face a semiconductor device (D); an objective lens which concentrates the light outputted from the light source onto the MO crystal; a holder which holds the MO crystal; a flexible member which lies between the MO crystal and the holder; and an objective lens driving unit which brings the MO crystal into contact with the semiconductor device (D) by moving the holder in the optical axis direction of the objective lens. Within a range in which the inclination angle of a plane of incidence of light in the MO crystal with respect to a plane orthogonal to the optical axis of the objective lens is the aperture angle or less of the objective lens, the plane of incidence can be inclined with respect to the plane orthogonal to the optical axis by bending of the flexible member when the MO crystal is brought into contact with the semiconductor device (D). |
