正型感光性树脂组成物及拨液性被膜,申请号TW100103967-传众专利搜索

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发明名称	正型感光性树脂组成物及拨液性被膜
摘要
申请公布号	TWI505034	申请公布日期	2015.10.21
申请号	TW100103967	申请日期	2011.02.01
申请人	日产化学工业股份有限公司	发明人	畑中真;内山芽育
分类号	G03F7/039;G03F7/075;G03F7/40;H01L21/027	主分类号	G03F7/039
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项	一种正型感光性树脂组成物，其为含有下述(A)成分、(B)成分、(C)成分及(D)成分，(A)成分：具有酸解离性基、脂肪族羟基及N取代马来醯亚胺基之丙烯酸基聚合物，(B)成分：具有酸解离性基及嵌段异氰酸酯基之丙烯酸基聚合物，(C)成分：具有酸解离性基、脂肪族羟基、碳原子数3至10之氟烷基及矽烷基醚基之丙烯酸基聚合物，(D)成分：光酸发生剂。
地址	日本

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