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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02134816(A)
申请公布日期
1990.05.23
申请号
JP19880289435
申请日期
1988.11.15
申请人
NEC CORP
发明人
TANAKA MASATO
分类号
H01L21/3205;H01L21/288
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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