METHOD FOR PRODUCING ALUMINUM FILM

摘要

Provided is a method for producing an aluminum film having a mirror surface and reduced residual stress. A method for producing an aluminum film includes electrodepositing aluminum on a surface of a substrate in an electrolyte solution, in which the electrolyte solution is obtained by adding, to a molten salt composed of aluminum chloride and an alkylimidazolium chloride, at least one compound A selected from the group consisting of an organic solvent, an organic polymer compound having a number-average molecular weight of 200 to 80,000, and a nitrogen-containing heterocyclic compound having 3 to 14 carbon atoms, and a compound B having an amino group.

主权项

1. A method for producing an aluminum film comprising electrodepositing aluminum on a surface of a substrate in an electrolyte solution,
wherein the electrolyte solution is obtained by adding, to a molten salt composed of aluminum chloride and an alkylimidazolium chloride, at least one compound A selected from the group consisting of an organic solvent, an organic polymer compound having a number-average molecular weight of 200 to 80,000, and a nitrogen-containing heterocyclic compound having 3 to 14 carbon atoms, and a compound B having an amino group.